Fabrication and Design of Resonant Microdevices

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is going to be fabricated. Resonant devices are generally two port systems: an input port to excite the structure and cause the resonance and an output port to monitor the behavior of the device. The next two chapters of the book are dedicated to excitation and signal detection methods. An analytic model of the device behavior is one of the most valuable design tools. A chapter is dedicated to this important issue followed by numerical simulation techniques. The book also covers the issues of damping and noise for resonant MEMS. These two topics are of particular importance for high-Q devices. Electronic interfacing and packaging issues are also discussed in separate chapters. The book concludes by giving numerous examples of resonant MEMS from the academia and industry with a brief analysis of them using the material that was presented in the earlier chapters. * Offers numerous academic and industrial examples of resonant MEMS * Provides an analytic model of device behavior * Explains two-port systems in detail * Devotes ample space to excitation and signal detection methods * Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices

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  • Author : Behraad Bahreyni
  • Publisher : William Andrew
  • Pages : 181 pages
  • ISBN : 9780815515777
  • Rating : 4/5 from 21 reviews
CLICK HERE TO GET THIS BOOKFabrication and Design of Resonant Microdevices

Fabrication and Design of Resonant Microdevices

Fabrication and Design of Resonant Microdevices
  • Author : Behraad Bahreyni
  • Publisher : William Andrew
  • Release : 17 October 2021
GET THIS BOOKFabrication and Design of Resonant Microdevices

This book discusses the main issues on fabrication, design, and applications of micromachined resonant devices as well as techniques that are commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). After a brief introduction to the concepts of resonance, an overview of the fabrication techniques for micromachined devices will be given. This section is a necessary part of the book as the options during the design of a resonant device strongly depend on how the device is

Fabrication & Design of Resonant Microdevices

Fabrication & Design of Resonant Microdevices
  • Author : Behraad Bahreyni
  • Publisher : William Andrew
  • Release : 20 October 2008
GET THIS BOOKFabrication & Design of Resonant Microdevices

This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues

Handbook of Silicon Based MEMS Materials and Technologies

Handbook of Silicon Based MEMS Materials and Technologies
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  • Publisher : William Andrew
  • Release : 02 September 2015
GET THIS BOOKHandbook of Silicon Based MEMS Materials and Technologies

The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS

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  • Author : Krzysztof Iniewski
  • Publisher : CRC Press
  • Release : 19 December 2017
GET THIS BOOKIntegrated Microsystems

As rapid technological developments occur in electronics, photonics, mechanics, chemistry, and biology, the demand for portable, lightweight integrated microsystems is relentless. These devices are getting exponentially smaller, increasingly used in everything from video games, hearing aids, and pacemakers to more intricate biomedical engineering and military applications. Edited by Kris Iniewski, a revolutionary in the field of advanced semiconductor materials, Integrated Microsystems: Electronics, Photonics, and Biotechnology focuses on techniques for optimized design and fabrication of these intelligent miniaturized devices and systems.

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  • Release : 12 September 2017
GET THIS BOOKGreen Materials for Electronics

Combining the materials science, technological, and device aspects of organic bioelectronics based on green materials, this is the first overview of the emerging concepts involving fabrication techniques for sustainable electronics with low energy and material consumption. With contributions from top-notch editors and authors, in one focus, the book covers a collection of natural materials suited for electronics applications such as paper, silk, melanin, DNA and nucleobases, resins, gums, saccharides, cellulose, gelatine and peptides. In another thrust, the book focuses on

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  • Publisher : William Andrew
  • Release : 12 February 2009
GET THIS BOOKNanotechnology Applications for Clean Water

The World Health Organization in 2004 estimated approximately 1.1 billion people did not have access to clean water and that 35% of Third World residents died from water-borne illnesses. While the situation is grim, recent advances strongly indicate that many of the current water quality problems can be addresses – and potentially resolved – using nanotechnology. Nanotechnology is already having a dramatic impact on research in water quality and Nanotechnology Applications for Clean Water highlights both the challenges and the opportunities for nanotechnology to positively

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  • Publisher : William Andrew
  • Release : 24 November 2009
GET THIS BOOKEmerging Nanotechnologies for Manufacturing

Nanotechnology is a technology on the verge of commercialization. In this important work, an unrivalled team of international experts provides an exploration of the emerging nanotechnologies that are poised to make the nano-revolution a reality in the manufacturing sector. From their different perspectives, the contributors explore how developments in nanotechnology are transforming areas as diverse as medicine, advanced materials, energy, electronics and agriculture. Key topics covered include: Characterization of nanostructures Bionanotechnology Nanoelectronics Micro- and nanomachining Self-assembly techniques New applications of

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  • Author : Nguyen Van Toan,Takahito Ono
  • Publisher : CRC Press
  • Release : 10 July 2019
GET THIS BOOKCapacitive Silicon Resonators

Microfabricated resonators play an essential role in a variety of applications, including mass sensing, timing reference applications, and filtering applications. Many transduction mechanisms including piezoelectric, piezoresistive, and capacitive mechanisms, have been studied to induce and detect the motion of resonators. This book is meant to introduce and suggest several technological approaches together with design considerations for performance enhancement of capacitive silicon resonators, and will be useful for those working in field of micro and nanotechnology. Features Introduces and suggests several

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  • Author : Yi Qin
  • Publisher : William Andrew
  • Release : 02 July 2010
GET THIS BOOKMicromanufacturing Engineering and Technology

This book presents applicable knowledge of technology, equipment and applications, and the core economic issues of micromanufacturing for anyone with a basic understanding of manufacturing, material, or product engineering. It explains micro-engineering issues (design, systems, materials, market and industrial development), technologies, facilities, organization, competitiveness, and innovation with an analysis of future potential. The machining, forming, and joining of miniature / micro-products are all covered in depth, covering: grinding/milling, laser applications, and photo chemical etching; embossing (hot & UV), injection molding and

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  • Author : Kevin Kuang
  • Publisher : BoD – Books on Demand
  • Release : 09 March 2012
GET THIS BOOKMagnetic Sensors

This book provides an introductory overview of the research done in recent years in the area of magnetic sensors. The topics presented in this book range from fundamental theories and properties of magnets and their sensing applications in areas such as biomedicine, microelectromechanical systems, nano-satellites and pedestrian tracking. Written for the readers who wished to obtain a basic understanding of the research area as well as to explore other potential areas of applications for magnetic sensors, this book presents exciting

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  • Publisher : Elsevier
  • Release : 17 November 2009
GET THIS BOOKNanotechnology Environmental Health and Safety

This book tackles the debate over nanotechnology's environmental health and safety (EHS) by thoroughly explaining EHS issues, financial implications, foreseeable risks (i.e. exposure, dose, hazards of nanomaterials), and the implications of occupational hygiene precautions and consumer protections. Real-world case studies are included, e.g. the discussion of a leading chemical company's unusual pairing with the USA's largest environmental NGO, and an innovative program designed for small- to mid-sized businesses, which became a model approach for proactive nanotechnology EHS risk

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  • Publisher : Cambridge University Press
  • Release : 23 January 2014
GET THIS BOOKIntroduction to Graphene-Based Nanomaterials

Beginning with an introduction to carbon-based nanomaterials, their electronic properties, and general concepts in quantum transport, this detailed primer describes the most effective theoretical and computational methods and tools for simulating the electronic structure and transport properties of graphene-based systems. Transport concepts are clearly presented through simple models, enabling comparison with analytical treatments, and multiscale quantum transport methodologies are introduced and developed in a straightforward way, demonstrating a range of methods for tackling the modelling of defects and impurities in

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  • Publisher : William Andrew
  • Release : 12 October 2009
GET THIS BOOKApplied Nanotechnology

Applied Nanotechnology: The Conversion of Research Results to Products examines the commercial and social aspects of nanotechnology. The book is organized into four parts. Part 1 presents an overview of nanotechnology. It discusses the definition of nanotechnology; the relationship between wealth, technology, and science; the relationship between nanotechnology and innovation; and the question of why one might wish to introduce nanotechnology. Part 2 explains the nanotechnology business and the applications of nanotechnology in a wide range of industries, including engineering, aerospace, automotive,

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  • Publisher : Springer Science & Business Media
  • Release : 06 December 2012
GET THIS BOOKThe Physics and Fabrication of Microstructures and Microdevices

les Houches This Winter School on "The Physics and Fabrication of Microstructures" originated with a European industrial decision to investigate in some detail the potential of custom-designed microstructures for new devices. Beginning in 1985, GEC and THOMSON started a collaboration on these subjects, supported by an ESPRIT grant from the Commission of the European Com munity. To the outside observer of the whole field, it appears clear that the world effort is very largely based in the United States and Japan.