Laser-Assisted Microtechnology deals with laser applications to a wide variety of problems in microelectronic design and fabrication. It covers micromachining of thin films, microprocessing of materials, maskless laser micropatterning and laser-assisted synthesis of thin-film systems. The monograph describes fundamental aspects and practical details of the technological processes as well as the optimum conditions for their realization.
Produk Detail:
- Author : Simeon M. Metev
- Publisher : Springer Science & Business Media
- Pages : 240 pages
- ISBN : 3642973272
- Release : 08 March 2013
- Rating : 4/5 from 21 reviews