Materials and Processes for Next Generation Lithography

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious extensions of traditional photopolymers. Currently most texts in this area focus on either lithography with perhaps one or two chapters on resists, or on traditional resist materials with relatively little consideration of new approaches. This book therefore aims to bring together the worlds foremost resist development scientists from the various community to produce in one place a definitive description of the many approaches to lithography fabrication. Assembles up-to-date information from the world’s premier resist chemists and technique development lithographers on the properties and capabilities of the wide range of resist materials currently under investigation Includes information on processing and metrology techniques Brings together multiple approaches to litho pattern recording from academia and industry in one place

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  • Author : Anonim
  • Publisher : Elsevier
  • Pages : 634 pages
  • ISBN : 0081003587
  • Rating : 4/5 from 21 reviews
CLICK HERE TO GET THIS BOOKMaterials and Processes for Next Generation Lithography

Materials and Processes for Next Generation Lithography

Materials and Processes for Next Generation Lithography
  • Author : Anonim
  • Publisher : Elsevier
  • Release : 08 November 2016
GET THIS BOOKMaterials and Processes for Next Generation Lithography

As the requirements of the semiconductor industry have become more demanding in terms of resolution and speed it has been necessary to push photoresist materials far beyond the capabilities previously envisioned. Currently there is significant worldwide research effort in to so called Next Generation Lithography techniques such as EUV lithography and multibeam electron beam lithography. These developments in both the industrial and the academic lithography arenas have led to the proliferation of numerous novel approaches to resist chemistry and ingenious

Drug Delivery Devices and Therapeutic Systems

Drug Delivery Devices and Therapeutic Systems
  • Author : Eric Chappel
  • Publisher : Academic Press
  • Release : 07 November 2020
GET THIS BOOKDrug Delivery Devices and Therapeutic Systems

Drug Delivery Devices and Therapeutic Systems examines the current technology and innovations moving drug delivery systems (DDS) forward. The book provides an overview on the therapeutic use of drug delivery devices, including design, applications, and a description of the design of each device. While other books focus on the therapy, the primary emphasis in this book is on current technologies for DDS applications, including microfluidics, nanotechnology, biodegradable hydrogel and microneedles, with a special emphasis on wearable DDS. As part of

Handbook of Nanophysics

Handbook of Nanophysics
  • Author : Klaus D. Sattler
  • Publisher : CRC Press
  • Release : 17 September 2010
GET THIS BOOKHandbook of Nanophysics

Many bottom-up and top-down techniques for nanomaterial and nanostructure generation have enabled the development of applications in nanoelectronics and nanophotonics. Handbook of Nanophysics: Nanoelectronics and Nanophotonics explores important recent applications of nanophysics in the areas of electronics and photonics. Each peer-reviewed chapter contains a broad-based introduction and enhances understanding of the state-of-the-art scientific content through fundamental equations and illustrations, some in color. This volume discusses how different nanomaterials, such as quantum dots and nanotubes, are used in quantum computing, capacitors,

Micro and Nano Machining of Engineering Materials

Micro and Nano Machining of Engineering Materials
  • Author : Kaushik Kumar,Divya Zindani,Nisha Kumari,J. Paulo Davim
  • Publisher : Springer
  • Release : 26 September 2018
GET THIS BOOKMicro and Nano Machining of Engineering Materials

This book covers the recent developments in the production of micro and nano size products, which cater to the needs of the industry. The processes to produce the miniature sized products with unique characteristics are addressed. Moreover, their application in areas such as micro-engines, micro-heat exchangers, micro-pumps, micro-channels, printing heads and medical implants are also highlighted. The book presents such microsystem-based products as important contributors to a sustainable economy. The recent research in this book focuses on the development of

Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines

Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines
  • Author : Munir H. Nayfeh
  • Publisher : Elsevier
  • Release : 29 June 2018
GET THIS BOOKFundamentals and Applications of Nano Silicon in Plasmonics and Fullerines

Fundamentals and Applications of Nano Silicon in Plasmonics and Fullerines: Current and Future Trends addresses current and future trends in the application and commercialization of nanosilicon. The book presents current, innovative and prospective applications and products based on nanosilicon and their binary system in the fields of energy harvesting and storage, lighting (solar cells and nano-capacitor and fuel cell devices and nanoLEDs), electronics (nanotransistors and nanomemory, quantum computing, photodetectors for space applications; biomedicine (substance detection, plasmonic treatment of disease, skin

Colloids for Nanobiotechnology

Colloids for Nanobiotechnology
  • Author : Wolfgang Parak,Neus Feliu
  • Publisher : Frontiers of Nanoscience, Volu
  • Release : 30 April 2020
GET THIS BOOKColloids for Nanobiotechnology

Colloids for Nanobiotechnology: Synthesis, Characterization and Potential Applications, Volume 17, offers a range of perspectives on emerging nano-inspired colloidal applications. With an emphasis on biomedical and environmental opportunities and challenges, the book outlines how nanotechnology is being used to increase the uses and impact of colloid science. Nanotechnology offers new horizons for colloidal research and synthesis routes that allow for the production of highly reproducible and defined materials. This book presents new characterization methods and a fundamental understanding of basic physicochemical,

Electronics

Electronics
  • Author : Michael Olorunfunmi Kolawole
  • Publisher : CRC Press
  • Release : 15 June 2020
GET THIS BOOKElectronics

This book gives clear explanations of the technical aspects of electronics engineering from basic classical device formulations to the use of nanotechnology to develop efficient quantum electronic systems. As well as being up to date, this book provides a broader range of topics than found in many other electronics books. This book is written in a clear, accessible style and covers topics in a comprehensive manner. This book’s approach is strongly application-based with key mathematical techniques introduced, helpful examples

Semiconductor Nanodevices

Semiconductor Nanodevices
  • Author : David Ritchie
  • Publisher : Elsevier
  • Release : 24 October 2021
GET THIS BOOKSemiconductor Nanodevices

Semiconductor Nanodevices: Physics, Technology and Applications opens with a section describing the fundamental technical and scientific background to the recent research covered in the subsequent chapters. This provides a suitable background for graduate students. This section covers firstly sample fabrication and characterization techniques. The growth techniques, primarily Molecular Beam epitaxy and Metal Organic Chemical Vapour Deposition are used for the growth of high purity epitaxial materials. There is also an emphasis on self-assembled growth of quantum dots and nanowires. This

Solvent-based Development of Photoresists for Next-generation Lithography

Solvent-based Development of Photoresists for Next-generation Lithography
  • Author : Christine Y. Ouyang
  • Publisher : Unknown Publisher
  • Release : 26 January 2022
GET THIS BOOKSolvent-based Development of Photoresists for Next-generation Lithography

As feature sizes continue to shrink, the need for new materials and new processes for next-generation lithography becomes more urgent. Although aqueous base development has been the industry standard for over twenty years, there are still several issues that need to be overcome. First, the high surface tension of aqueous base developers can lead to pattern collapse of high aspect ratio patterns and limit resolution. The toxicity of aqueous base developers has also raised concerns about the environment. In order

Computational Modelling of Nanomaterials

Computational Modelling of Nanomaterials
  • Author : Panagiotis Grammatikopoulos
  • Publisher : Elsevier
  • Release : 30 September 2020
GET THIS BOOKComputational Modelling of Nanomaterials

Due to their small size and their dependence on very fast phenomena, nanomaterials are ideal systems for computational modelling. This book provides an overview of various nanosystems classified by their dimensions: 0D (nanoparticles, QDs, etc.), 1D (nanowires, nanotubes), 2D (thin films, graphene, etc.), 3D (nanostructured bulk materials, devices). Fractal dimensions, such as nanoparticle agglomerates, percolating films and combinations of materials of different dimensionalities are also covered (e.g. epitaxial decoration of nanowires by nanoparticles, i.e. 0D+1D nanomaterials). For

Cluster Beam Deposition of Functional Nanomaterials and Devices

Cluster Beam Deposition of Functional Nanomaterials and Devices
  • Author : Paolo Milani
  • Publisher : Unknown Publisher
  • Release : 01 March 2020
GET THIS BOOKCluster Beam Deposition of Functional Nanomaterials and Devices

Cluster Beam Deposition of Functional Nanomaterials and Devices, Volume 15, provides up-to-date information on the CBD of novel nanomaterials and devices. The book offers an overview of gas phase synthesis in a range of nanoparticles, along with discussions on the development of several devices and applications. Applications include, but are not limited to catalysis, smart nanocomposites, nanoprobes, electronic devices, gas sensors and biosensors. This is an important reference source for materials scientists and engineers who want to learn more about this

Nanostructured Thin Films

Nanostructured Thin Films
  • Author : Maria Benelmekki,Andreas Erbe
  • Publisher : Elsevier
  • Release : 25 August 2019
GET THIS BOOKNanostructured Thin Films

Nanostructured Thin Films: Fundamentals and Applications presents an overview of the synthesis and characterization of thin films and their nanocomposites. Both vapor phase and liquid phase approaches are discussed, along with the methods that are sufficiently attractive for large-scale production. Examples of applications in clean energy, sensors, biomedicine, anticorrosion and surface modification are also included. As the applications of thin films in nanomedicine, cell phones, solar cell-powered devices, and in the protection of structural materials continues to grow, this book

Computational Modelling of Nanoparticles

Computational Modelling of Nanoparticles
  • Author : Stefan T. Bromley,Scott M. Woodley
  • Publisher : Elsevier
  • Release : 12 September 2018
GET THIS BOOKComputational Modelling of Nanoparticles

Computational Modelling of Nanoparticles highlights recent advances in the power and versatility of computational modelling, experimental techniques, and how new progress has opened the door to a more detailed and comprehensive understanding of the world of nanomaterials. Nanoparticles, having dimensions of 100 nanometers or less, are increasingly being used in applications in medicine, materials and manufacturing, and energy. Spanning the smallest sub-nanometer nanoclusters to nanocrystals with diameters of 10s of nanometers, this book provides a state-of-the-art overview on how computational modelling

Micro/Nanolithography

Micro/Nanolithography
  • Author : Jagannathan Thirumalai
  • Publisher : BoD – Books on Demand
  • Release : 02 May 2018
GET THIS BOOKMicro/Nanolithography

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction

Patternable Materials for Next-generation Lithography

Patternable Materials for Next-generation Lithography
  • Author : Austin Patrick Lane
  • Publisher : Unknown Publisher
  • Release : 26 January 2022
GET THIS BOOKPatternable Materials for Next-generation Lithography

One of the salient truths facing the microelectronics industry today is that photolithography tools are unable to meet the resolution requirements for manufacturing next-generation devices. In the past, circuit feature sizes have been minimized by reducing the exposure wavelength used for patterning. However, this strategy failed with the worldwide dereliction of 157 nm lithography in 2003. Extreme ultraviolet (EUV) lithography still faces many technical challenges and is not ready for high volume manufacturing. How will the microelectronics industry continue to innovate without