Nanolithography

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special attention is paid to related issues, such as the resists used in lithography, the masks (or lack thereof), the metrology needed for nano-features, modeling, and the limitations caused by feature edge roughness. In addition emerging technologies are described, including the directed assembly of wafer features, nanostructures and devices, nano-photonics, and nano-fluidics. This book is intended as a guide to the researcher new to this field, reading related journals or facing the complexities of a technical conference. Its goal is to give enough background information to enable such a researcher to understand, and appreciate, new developments in nanolithography, and to go on to make advances of his/her own. Outlines the current state of the art in alternative nanolithography technologies in order to cope with the future reduction in size of semiconductor chips to nanoscale dimensions Covers lithographic techniques, including optical projection, extreme ultraviolet (EUV), nanoimprint, electron beam and ion beam lithography Describes the emerging applications of nanolithography in nanoelectronics, nanophotonics and microfluidics

Produk Detail:

  • Author : M Feldman
  • Publisher : Woodhead Publishing
  • Pages : 592 pages
  • ISBN : 0857098756
  • Rating : 4/5 from 21 reviews
CLICK HERE TO GET THIS BOOKNanolithography

Nanolithography

Nanolithography
  • Author : M Feldman
  • Publisher : Woodhead Publishing
  • Release : 13 February 2014
GET THIS BOOKNanolithography

Integrated circuits, and devices fabricated using the techniques developed for integrated circuits, have steadily gotten smaller, more complex, and more powerful. The rate of shrinking is astonishing – some components are now just a few dozen atoms wide. This book attempts to answer the questions, “What comes next? and “How do we get there? Nanolithography outlines the present state of the art in lithographic techniques, including optical projection in both deep and extreme ultraviolet, electron and ion beams, and imprinting. Special

Nanolithography

Nanolithography
  • Author : M. Gentili,Carlo Giovannella,Stefano Selci
  • Publisher : Springer Science & Business Media
  • Release : 09 March 2013
GET THIS BOOKNanolithography

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the

Nanolithography and Patterning Techniques in Microelectronics

Nanolithography and Patterning Techniques in Microelectronics
  • Author : D Bucknall
  • Publisher : Elsevier
  • Release : 30 September 2005
GET THIS BOOKNanolithography and Patterning Techniques in Microelectronics

Techniques such as surface patterning have facilitated the emergence of advanced polymers with applications in areas such as microelectronics. Surface patterning of polymers has conventionally been undertaken by optical lithography. However, a new generation of nanolithographic and patterning techniques has made it possible to develop complex patterns at the nanoscale. Non-conventional lithography and patterning summarises this new range of techniques and their industrial applications. A number of chapters look at ways of forming and modifying surfaces for patterning. These are

Micro/Nanolithography

Micro/Nanolithography
  • Author : Jagannathan Thirumalai
  • Publisher : BoD – Books on Demand
  • Release : 02 May 2018
GET THIS BOOKMicro/Nanolithography

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction

Selected Topics in Nanoscience and Nanotechnology

Selected Topics in Nanoscience and Nanotechnology
  • Author : Andrew T. S. Wee
  • Publisher : World Scientific
  • Release : 08 December 2021
GET THIS BOOKSelected Topics in Nanoscience and Nanotechnology

Selected Topics in Nanoscience and Nanotechnology contains a collection of papers in the subfields of scanning probe microscopy, nanofabrication, functional nanoparticles and nanomaterials, molecular engineering and bionanotechnology. Written by experts in their respective fields, it is intended for a general scientific readership who may be non-specialists in these subjects, but who want a reasonably comprehensive introduction to them. This volume is also suitable as resource material for a senior undergraduate or introductory graduate course in nanoscience and nanotechnology.

Nanofabrication

Nanofabrication
  • Author : Jose Maria de Teresa
  • Publisher : Myprint
  • Release : 21 December 2020
GET THIS BOOKNanofabrication

A comprehensive edited volume on important and up-to-date nanolithography techniques and applications. The book includes an introduction on the importance of nanolithography in today's research and technology, providing examples of its applications. The remainder of the book is split into two sections. The first section contains the most important and established nanolithography techniques. As well as a detailed description of each technique, the reader can obtain useful information about the main advantages and drawbacks of each technique in terms of

Nanolithography of Biointerfaces

Nanolithography of Biointerfaces
  • Author : Royal Society of Chemistry
  • Publisher : ISSN
  • Release : 13 November 2019
GET THIS BOOKNanolithography of Biointerfaces

This book discusses how the combination of physical and organic chemistry will continue to drive advances in the field, and provide new approaches to understanding, and in turn, creating biomimetic materials with precisely controlled nanoscale structure in three dimensions.

Nano Lithography

Nano Lithography
  • Author : Stefan Landis
  • Publisher : John Wiley & Sons
  • Release : 04 March 2013
GET THIS BOOKNano Lithography

Lithography is an extremely complex tool – based on the concept of “imprinting” an original template version onto mass output – originally using relatively simple optical exposure, masking, and etching techniques, and now extended to include exposure to X-rays, high energy UV light, and electron beams – in processes developed to manufacture everyday products including those in the realms of consumer electronics, telecommunications, entertainment, and transportation, to name but a few. In the last few years, researchers and engineers have pushed the envelope

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology

Micro/Nanolithography - A Heuristic Aspect on the Enduring Technology
  • Author : Jagannathan Thirumalai
  • Publisher : Unknown Publisher
  • Release : 08 December 2021
GET THIS BOOKMicro/Nanolithography - A Heuristic Aspect on the Enduring Technology

The main objective of this book is to give proficient people a comprehensive review of up-to-date global improvements in hypothetical and experimental evidences, perspectives and prospects of some newsworthy instrumentation and its numerous technological applications for a wide range of lithographic fabrication techniques. The present theme of this book is concomitant with the lithographic ways and means of deposition, optimization parameters and their wide technological applications. This book consists of six chapters comprehending with eminence of lithography, fabrication and reproduction

Scanning Probe Microscopy of Soft Matter

Scanning Probe Microscopy of Soft Matter
  • Author : Vladimir V. Tsukruk,Srikanth Singamaneni
  • Publisher : John Wiley & Sons
  • Release : 09 January 2012
GET THIS BOOKScanning Probe Microscopy of Soft Matter

Well-structured and adopting a pedagogical approach, this self-contained monograph covers the fundamentals of scanning probe microscopy, showing how to use the techniques for investigating physical and chemical properties on the nanoscale and how they can be used for a wide range of soft materials. It concludes with a section on the latest techniques in nanomanipulation and patterning. This first book to focus on the applications is a must-have for both newcomers and established researchers using scanning probe microscopy in soft

Nanostructured Thin Films and Surfaces

Nanostructured Thin Films and Surfaces
  • Author : Anonim
  • Publisher : John Wiley & Sons
  • Release : 29 March 2010
GET THIS BOOKNanostructured Thin Films and Surfaces

These ten volumes provide an excellent, in-depth overview of all nanomaterial types and their uses in the life sciences. Each volume is dedicated to a specific material class and covers fundamentals, synthesis strategies, structure-property relationships, material behaviour finetuning, biological effects and applications in the life sciences. All important material classes are covered: metallic, metal oxide, magnetic, carbon, polymeric, composite and semiconducting nanomaterials as well as nanostructured surfaces and films.

Tip-Based Nanofabrication

Tip-Based Nanofabrication
  • Author : Ampere A. Tseng
  • Publisher : Springer Science & Business Media
  • Release : 25 July 2011
GET THIS BOOKTip-Based Nanofabrication

Nanofabrication is critical to the realization of potential benefits in the field of electronics, bioengineering and material science. One enabling technology in nanofabrication is Tip-Based Nanofabrication, which makes use of functionalized micro-cantilevers with nanoscale tips. Tip-Based Nanofabrication: Fundamentals and Applications discusses the development of cantilevered nanotips and how they evolved from scanning probe microscopy and are able to manipulate environments at nanoscale on substrates generating different nanoscale patterns and structures. Also covered are the advantages of ultra-high resolution capability, how