Sputtering Materials for VLSI and Thin Film Devices

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering target performance on overall productivity of various processes. Two unique chapters of this book deal with productivity and troubleshooting issues. The content of the book has been divided into two sections: (a) the first section (Chapter 1 to Chapter 3) has been prepared for the readers from a range of disciplines (e.g. electrical, chemical, chemistry, physics) trying to get an insight into use of sputtered films in various devices (e.g. semiconductor, display, photovoltaic, data storage), basic of sputtering and performance of sputtering target in relation to productivity, and (b) the second section (Chapter 4 to Chapter 8) has been prepared for readers who already have background knowledge of sputter deposition of thin films, materials science principles and interested in the details of sputtering target manufacturing methods, sputtering behavior and thin film properties specific to semiconductor, liquid crystal display, photovoltaic and magnetic data storage applications. In Chapters 5 to 8, a general structure has been used, i.e. a description of the applications of sputtered thin films, sputtering target manufacturing methods (including flow charts), sputtering behavior of targets (e.g. current - voltage relationship, deposition rate) and thin film properties (e.g. microstructure, stresses, electrical properties, in-film particles). While discussing these topics, attempts have been made to include examples from the actual commercial processes to highlight the increased complexity of the commercial processes with the growth of advanced technologies. In addition to personnel working in industry setting, university researchers with advanced knowledge of sputtering would also find discussion of such topics (e.g. attributes of target design, chamber design, target microstructure, sputter surface characteristics, various troubleshooting issues) useful. . Unique coverage of sputtering target manufacturing methods in the light of semiconductor, displays, data storage and photovoltaic industry requirements Practical information on technology trends, role of sputtering and major OEMs Discussion on properties of a wide variety of thin films which include silicides, conductors, diffusion barriers, transparent conducting oxides, magnetic films etc. Practical case-studies on target performance and troubleshooting Essential technological information for students, engineers and scientists working in the semiconductor, display, data storage and photovoltaic industry

Produk Detail:

  • Author : Jaydeep Sarkar
  • Publisher : William Andrew
  • Pages : 608 pages
  • ISBN : 0815519877
  • Rating : 4/5 from 21 reviews
CLICK HERE TO GET THIS BOOKSputtering Materials for VLSI and Thin Film Devices

Sputtering Materials for VLSI and Thin Film Devices

Sputtering Materials for VLSI and Thin Film Devices
  • Author : Jaydeep Sarkar
  • Publisher : William Andrew
  • Release : 13 December 2010
GET THIS BOOKSputtering Materials for VLSI and Thin Film Devices

An important resource for students, engineers and researchers working in the area of thin film deposition using physical vapor deposition (e.g. sputtering) for semiconductor, liquid crystal displays, high density recording media and photovoltaic device (e.g. thin film solar cell) manufacturing. This book also reviews microelectronics industry topics such as history of inventions and technology trends, recent developments in sputtering technologies, manufacturing steps that require sputtering of thin films, the properties of thin films and the role of sputtering

Thin Film Device Applications

Thin Film Device Applications
  • Author : Kasturi Chopra
  • Publisher : Springer Science & Business Media
  • Release : 06 December 2012
GET THIS BOOKThin Film Device Applications

Two-dimensional materials created ab initio by the process of condensation of atoms, molecules, or ions, called thin films, have unique properties significantly different from the corresponding bulk materials as a result of their physical dimensions, geometry, nonequilibrium microstructure, and metallurgy. Further, these characteristic features of thin films can be drasti cally modified and tailored to obtain the desired and required physical characteristics. These features form the basis of development of a host of extraordinary active and passive thin film device

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  • Author : Abdel Salam Hamdy Makhlouf,Nedal Yusuf Abu-Thabit
  • Publisher : Elsevier
  • Release : 25 October 2019
GET THIS BOOKAdvances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications

Advances In Smart Coatings And Thin Films For Future Industrial and Biomedical Engineering Applications discusses in detail, the recent trends in designing, fabricating and manufacturing of smart coatings and thin films for future high-tech. industrial applications related to transportation, aerospace and biomedical engineering. Chapters cover fundamental aspects and diverse approaches used to fabricate smart self-healing anti-corrosion coatings, shape-memory coatings, polymeric and nano-bio-ceramic cotings, bio-inspired and stimuli-responsive coatings for smart surfaces with antibacterial activkity and controlled wettability, and electrically conductive coatings

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  • Author : Donald M. Mattox
  • Publisher : William Andrew
  • Release : 21 August 2018
GET THIS BOOKThe Foundations of Vacuum Coating Technology

The Foundations of Vacuum Coating Technology, Second Edition, is a revised and expanded version of the first edition, which was published in 2003. The book reviews the histories of the various vacuum coating technologies and expands on the history of the enabling technologies of vacuum technology, plasma technology, power supplies, and low-pressure plasma-enhanced chemical vapor deposition. The melding of these technologies has resulted in new processes and products that have greatly expanded the application of vacuum coatings for use in our

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  • Author : Nadine Collaert
  • Publisher : Woodhead Publishing
  • Release : 29 June 2018
GET THIS BOOKHigh Mobility Materials for CMOS Applications

High Mobility Materials for CMOS Applications provides a comprehensive overview of recent developments in the field of (Si)Ge and III-V materials and their integration on Si. The book covers material growth and integration on Si, going all the way from device to circuit design. While the book's focus is on digital applications, a number of chapters also address the use of III-V for RF and analog applications, and in optoelectronics. With CMOS technology moving to the 10nm node and

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  • Author : Nikolay Nikitenkov
  • Publisher : BoD – Books on Demand
  • Release : 08 March 2017
GET THIS BOOKModern Technologies for Creating the Thin-film Systems and Coatings

Development of the thin film and coating technologies (TFCT) made possible the technological revolution in electronics and through it the revolution in IT and communications in the end of the twentieth century. Now, TFCT penetrated in many sectors of human life and industry: biology and medicine; nuclear, fusion, and hydrogen energy; protection against corrosion and hydrogen embrittlement; jet engine; space materials science; and many others. Currently, TFCT along with nanotechnologies is the most promising for the development of almost all

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  • Author : Robert A. Dorey
  • Publisher : William Andrew
  • Release : 18 September 2021
GET THIS BOOKCeramic Thick Films for MEMS and Microdevices

The MEMS (Micro Electro-Mechanical Systems) market returned to growth in 2010. The total MEMS market is worth about $6.5 billion, up more than 11 percent from last year and nearly as high as its historic peak in 2007. MEMS devices are used across sectors as diverse as automotive, aerospace, medical, industrial process control, instrumentation and telecommunications - forming the nerve center of products including airbag crash sensors, pressure sensors, biosensors and ink jet printer heads. Part of the MEMS cluster within the Micro & Nano

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  • Author : Ning Xi,King Wai Chiu Lai
  • Publisher : William Andrew
  • Release : 18 September 2021
GET THIS BOOKNano-optoelectronic Sensors and Devices

Nanophotonics has emerged as a major technology and applications domain, exploiting the interaction of light-emitting and light-sensing nanostructured materials. These devices are light-weight, highly efficient, low on power consumption, and are cost effective to produce. The authors of this book have been involved in pioneering work in manufacturing photonic devices from carbon nanotube (CNT) nanowires and provide a series of practical guidelines for their design and manufacture, using processes such as nano-robotic manipulation and assembly methods. They also introduce the

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  • Author : Karthikeyan Subramani,Waqar Ahmed
  • Publisher : William Andrew
  • Release : 15 November 2011
GET THIS BOOKEmerging Nanotechnologies in Dentistry

New nanomaterials are leading to a range of emerging dental treatments that utilize more biomimetic materials that more closely duplicate natural tooth structure (or bone, in the case of implants). The use of nanostructures that will work in harmony with the body’s own regenerative processes (eg, to restore tooth structure or alveolar bone) are moving into clinical practice. This book brings together an international team of experts from the fields of nanomaterials, biomedical engineering and dentistry, to cover the

Micromixers

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  • Author : Nam-Trung Nguyen
  • Publisher : William Andrew
  • Release : 17 September 2011
GET THIS BOOKMicromixers

The ability to mix minute quantities of fluids is critical in a range of recent and emerging techniques in engineering, chemistry and life sciences, with applications as diverse as inkjet printing, pharmaceutical manufacturing, specialty and hazardous chemical manufacturing, DNA analysis and disease diagnosis. The multidisciplinary nature of this field – intersecting engineering, physics, chemistry, biology, microtechnology and biotechnology – means that the community of engineers and scientists now engaged in developing microfluidic devices has entered the field from a variety of different

TMS 2016 Supplemental Proceedings

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  • Author : The Minerals, Metals & Materials Society (TMS)
  • Publisher : John Wiley & Sons
  • Release : 09 February 2016
GET THIS BOOKTMS 2016 Supplemental Proceedings

The TMS 2016 Annual Meeting Supplemental Proceedings is a collection of papers from the TMS 2016 Annual Meeting & Exhibition, held February 14-18 in Nashville, Tennessee, USA. The papers in this volume represent 21 symposia from the meeting. This volume, along with the other proceedings volumes published for the meeting, and archival journals, such as Metallurgical and Materials Transactions and Journal of Electronic Materials, represents the available written record of the 67 symposia held at TMS2016. This proceedings volume contains both edited and unedited papers;

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  • Author : Henry Radamson,Eddy Simoen,Jun Luo,Chao Zhao
  • Publisher : Woodhead Publishing
  • Release : 03 April 2018
GET THIS BOOKCMOS Past, Present and Future

CMOS Past, Present and Future provides insight from the basics, to the state-of-the-art of CMOS processing and electrical characterization, including the integration of Group IV semiconductors-based photonics. The book goes into the pitfalls and opportunities associated with the use of hetero-epitaxy on silicon with strain engineering and the integration of photonics and high-mobility channels on a silicon platform. It begins with the basic definitions and equations, but extends to present technologies and challenges, creating a roadmap on the origins of

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  • Author : Krishna Seshan
  • Publisher : CRC Press
  • Release : 01 February 2002
GET THIS BOOKHandbook of Thin Film Deposition Techniques Principles, Methods, Equipment and Applications, Second Editon

The Handbook of Thin Film Deposition Techniques: Principles, Methods, Equipment and Applications, Second Edition explores the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. This second edition explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of submicron dimensions.

Microelectromechanical Systems

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  • Author : National Research Council,Division on Engineering and Physical Sciences,National Materials Advisory Board,Commission on Engineering and Technical Systems,Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems
  • Publisher : National Academies Press
  • Release : 01 January 1998
GET THIS BOOKMicroelectromechanical Systems

Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and